A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution

Title:: A CMOS Temperature Stabilized 2-Dimensional Mechanical Stress Sensor with 11-bit Resolution
Document type:: Konferenzbeitrag
Author(s):: Nurmetov, U.; Fritz, T.; Müllner, E.; Dougherty, C.; Kreupl, F.; Brederlow, R.
Keywords:: CMOS integrated circuits; error compensation; sensors; stress measurement; N-Well-based primary elements; stress magnitude; CMOS temperature stabilized sensor; 2D CMOS stress sensor; 2D mechanical stress sensor; repeatable error compensation; pressure -100.0 MPa to 360.0 MPa; temperature 5.0 degC to 90.0 degC; Stress; Resistors; Temperature sensors; Temperature measurement; Robot sensing systems; Stress measurement
Book / Congress title:: 2019 Symposium on VLSI Circuits
Year:: 2019
Month:: June
Pages:: C64-C65
Fulltext / DOI:: doi:10.23919/VLSIC.2019.8778132
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