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Titel:

Morphology of {{Fe}} Nanolayers with {{Pt}} Overlayers on Low-Temperature Annealing

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Gong, J.; Paul, N.; Nagy, B.; Dolgos, M.; Bottyán, L.; {M̈uller-Buschbaum}, P.; B̈oni, P.; Zheng, J.-G.; Paul, A.
Abstract:
Agglomeration or dewetting is technologically important in the microelectronics industry as it is one of the methods of producing arrays of nanosized metal clusters. This report investigates the grain morphology evolution due to low-temperature annealing (473 K) in Fe layers with Pt overlayers. X-ray diffuse scattering and grazing-incidence small-angle X-ray scattering (GISAXS) have been used to access different correlation lengths and correlate them with grain sizes from transmission electron m...     »
Zeitschriftentitel:
Journal of Applied Crystallography
Jahr:
2016
Band / Volume:
49
Monat:
oct
Heft / Issue:
5
Seitenangaben Beitrag:
1682
Sprache:
en
Volltext / DOI:
doi:10.1107/S1600576716011882
Print-ISSN:
1600-5767
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