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- Title:
Height control for small periodic structures using x-ray radiography
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Schüttler, Markus; Meyer, Pascal; Schaff, Florian; Yaroshenko, Andre; Kunka, Danays; Besser, Heino; Pfeiffer, Franz; Mohr, Jürgen
- Journal title:
- Measurement Science and Technology
- Year:
- 2016
- Journal volume:
- 27
- Pages contribution:
- 025015
- Fulltext / DOI:
- doi:10.1088/0957-0233/27/2/025015
- Publisher:
- IOP Publishing
- E-ISSN:
- 0957-02331361-6501
- Date of publication:
- 11.01.2016
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