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- Title:
Geometric Tuning of Stress in Predisplaced Silicon Nitride Resonators
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Hoch, David; Yao, Xiong; Poot, Menno
- Journal title:
- Nano Letters
- Year:
- 2022
- Journal volume:
- 22
- Journal issue:
- 10
- Pages contribution:
- 4013-4019
- Fulltext / DOI:
- doi:10.1021/acs.nanolett.2c00613
- Publisher:
- American Chemical Society (ACS)
- E-ISSN:
- 1530-69841530-6992
- Date of publication:
- 05.05.2022
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