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- Author(s):
- Coccetti, Fabio; Vietzorreck, Larissa; Chtchekatourov, Vitali; Russer, Peter
- Title:
- A numerical study of MEMS capacitive switches
- Book / Congress title:
- 16th Annual Review of Progress in Applied Computational Electromagnetics (ACES)
- Publisher address:
- Monterey, CA, USA
- Year:
- 2000
- Month:
- mar
- Pages:
- 580--586
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