- Title:
Measurement Set Up to Characterize The Separation Force for PZT-Silicon Assemblies
- Document type:
- Report / Forschungsbericht
- Author(s):
- Sali, Y.
- Contracting organization:
- Fachgebiet Mikrostrukturierte Mechatronische Systeme
- Year:
- 2013
- Format:
- Text
- BibTeX