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Title:

Simulation of thick film PZT actuators with interdigitated electrodes

Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Zaki, M.; Zähringer, S.; Schwesinger, N.
Pages contribution:
38/1-8
Book / Congress title:
Smart Sensors, Actuators, and MEMS VI
Volume:
Proc. SPIE 8763
Organization:
SPIE
Congress city:
Grenoble
Publisher:
SPIE
Year:
2013
Month:
Apr
Pages:
8
Reviewed:
ja
Language:
en
Publication format:
WWW
Fulltext / DOI:
doi:10.1117/12.2017411
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