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- Title:
Optimization of process technology for the fabrication of a novel piezoelectric actuator
- Document type:
- Report / Forschungsbericht
- Author(s):
- Goh, Z.
- Contracting organization:
- Fachgebiet Mikrostrukturierte Mechatronische Systeme
- Year:
- 2013
- Year / month:
- 2013-03
- Format:
- Text
BibTeX