User: Guest  Login
More Searchfields
Simple search
Title:

Scalable fabrication of metallic nanogaps using CMOS-based 10 nm spacer lithography

Document type:
Konferenzbeitrag
Author(s):
Chryssikos, Domenikos; Heigl, Martin; Kounoupioti, Evanthia; Neumeier, Karl; Wieland, Robert; Tornow, Marc /
Book / Congress title:
2022 IEEE 22nd International Conference on Nanotechnology (NANO)
Publisher:
IEEE
Date of publication:
04.07.2022
Year:
2022
Fulltext / DOI:
doi:10.1109/nano54668.2022.9928620
 BibTeX