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Titel:

Directed Self-assembly of Silicon Nanocubes Fabricated by Nano Imprint-Lithography

Dokumenttyp:
Konferenzbeitrag
Art des Konferenzbeitrags:
Vortrag / Präsentation
Autor(en):
Speckbacher, M.; Osman; E.; Gibbs; J.; Tornow, M.
Abstract:
The fabrication, electrical characterization and self-assembly of silicon nanocubes (SiNCs) is reported. Arrays of highly doped SiNCs featuring edge lengths of 110 nm are fabricated in large yields on silicon-on-insulator substrates using nano imprint-lithography as well as wet chemical and dry etching techniques. Interdigitated electrode arrays serve as a platform for the electrical characterization of single SiNCs. Self-assembly of SiNC agglomerates in solution is realized by cube surface func...     »
Kongress- / Buchtitel:
IEEE 18th International Conference on Nanotechnology (IEEE-NANO)
Kongress / Zusatzinformationen:
Cork, Ireland, 23-26 July 2018-07
Jahr:
2018
Quartal:
3. Quartal
Jahr / Monat:
2018-07
Monat:
Jul
Print-ISBN:
978-1-5386-5336-4
E-ISBN:
978-1-5386-5337-1
Serien-ISSN:
1944-9380, 1944-9399
Sprache:
en
Volltext / DOI:
doi:10.1109/NANO.2018.8626349
WWW:
https://ieeexplore.ieee.org/document/8626349
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