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Title:

Numerical Investigation of Micromachined Structures with Thin Layers

Author(s):
Vietzorreck, Larissa; Russer, Peter
Abstract:
In the present paper we analyze numerically the high-frequency behavior of different micromachined structures including MEMS. One special feature of micromachined structures is the presence of very thin layers - compared to other geometrical dimensions, resulting from the technological process. With usual numerical methods, where the entire domain is discretized, those thin layers are difficult to consider. The alternatives are a very small mesh size with the resulting extreme long calculation t...     »
Book / Congress title:
30th European Microwave Conference (EUMA)
Publisher address:
Paris, France
Year:
2000
Month:
oct
Pages:
154--157
Fulltext / DOI:
doi:10.1109/EUMA.2000.338793
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