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- Title:
Silicon-Based Millimeterwave MEMS Switches
- Author(s):
- Ulm, M.; Vietzorreck, Larissa; Reimann, M.; Walter, T.; Müller-Fiedler, R.; Kaspar, E.; Russer, Peter
- Book / Congress title:
- International Symposium on Signals, Systems, and Electronics (ISSSE)
- Publisher address:
- Tokyo, Japan
- Year:
- 2001
- Month:
- jul
- Pages:
- 110--113
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