Selimovic, Nermin; Bader, Bernhard; Kiwitt, Jürgen; Pitschi, Maximilian; Eibert, Thomas F.
Titel:
Enhanced Electromagnetic Modeling of Bulk Acoustic Wave Resonators and Filters
Seitenangaben Beitrag:
1--1
Abstract:
This paper presents different enhanced electromagnetic models of mirror-type BAW resonators that are simulated with a 3D electromagnetic solver, whereas the acoustic effects are computed with a 1D solver. Further, the effects of the electromagnetic mesh-cell-density in simulations for the different resonator models are analyzed. The simulations of BAW resonators and duplexers can be improved by appropriate electromagnetic modeling and specific knowledge about the simulated device.