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- Title:
Focused Ion Beam Lithography for Rapid Prototyping of Metallic Films
- Author(s):
- Osswald, Patrick; Kiermaier, Josef; Becherer, Markus; Schmitt-Landsiedel, Doris
- Pages contribution:
- 310
- Book / Congress title:
- Verhandl. DPG (VI)
- Volume:
- 45
- Year:
- 2010
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