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- Author(s):
- Abd Allah, Mohamed; Thalhammer, Robert; Kaitila, Jyrki; Herzog, Thomas; Weber, Werner; Schmitt-Landsiedel, Doris
- Title:
- Solidly mounted BAW resonators with layer-transferred AlN using sacrificial Si surfaces
- Keywords:
- BAW
- Congress title:
- Selected Papers from the ESSDERC 2009 Conference
- Journal title:
- Solid-State Electronics
- Year:
- 2010
- Journal volume:
- 54
- Month:
- sep
- Journal issue:
- 9
- Pages contribution:
- 1041 - 1046
- Fulltext / DOI:
- doi:DOI: 10.1016/j.sse.2010.04.031
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