Solidly mounted BAW resonators with layer-transferred AlN using sacrificial Si surfaces

Titel:: Solidly mounted BAW resonators with layer-transferred AlN using sacrificial Si surfaces
Autor(en):: Abd Allah, Mohamed; Thalhammer, Robert; Kaitila, Jyrki; Herzog, Thomas; Weber, Werner; Schmitt-Landsiedel, Doris
Stichworte:: BAW
Kongresstitel:: Selected Papers from the ESSDERC 2009 Conference
Zeitschriftentitel:: Solid-State Electronics
Jahr:: 2010
Band / Volume:: 54
Monat:: sep
Heft / Issue:: 9
Seitenangaben Beitrag:: 1041 - 1046
Volltext / DOI:: doi:DOI: 10.1016/j.sse.2010.04.031
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