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Titel:

Direct transfer patterning of gold films with minimal processing steps

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Fakhr, O.; Karrai, K.; Lugli; P.
Abstract:
We were able to reduce the processing steps of transfer printing of thin gold films through prolonged evaporation times. We suspect the reduced evaporation rate to cause diffusion of small chain molecules (oligomers) in the PDMS (poly(dimethylsiloxane)) stamp to facilitate the transfer. Typical wrinkling of the PDMS surface was avoided by fabricating thin stamps of approximately 50 μm with polymer backing. The transferred films with a thickness of 20 nm showed enhanced edge resolution and a roug...     »
Stichworte:
Soft lithography; Nano patterning; Poly(dimethylsilozane); Gold; Electrodes
Zeitschriftentitel:
Thin Solid Films Volume 520, Issue 7, 31 January 2012, Pages 2600–2604
Jahr:
2012
Jahr / Monat:
2012-01
Quartal:
1. Quartal
Monat:
Jan
Seitenangaben Beitrag:
2600 - 2604
Reviewed:
ja
Sprache:
en
Volltext / DOI:
doi:10.1016/j.tsf.2011.11.006
WWW:
http://www.sciencedirect.com/science/article/pii/S0040609011019742
Verlag / Institution:
Elsevier B.V.
Status:
Erstveröffentlichung
Format:
Text
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