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Titel:

Patterning poly(3-hexylthiophene) (P3HT) in the sub-50-nm Region by Nanoimprint Lithography

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Scarpa, G.; Abdellah, A.; Exner, A.; Harrer, S.; Penso Blanco, G.; Wiedemann, W.; Schmidt-Mende, L.; Lugli, P.
Abstract:
We use thermal and room temperature nanoimprint lithography (NIL) for directly patterning the photoactive polymer poly(3-hexylthiophene-2,5-diyl) (P3HT) in the sub-50-nm region. Different types of molds were used to directly imprint the desired structures into P3HT thin films. Good pattern transfer is achieved independent of the presence of other underlying polymer layers or the type of substrate incorporated. Further, we discuss the future application of this technology to the fabrication of or...     »
Zeitschriftentitel:
Nanotechnology, IEEE Transactions on (Volume:10 , Issue: 3 )
Jahr:
2010
Jahr / Monat:
2010-04
Quartal:
2. Quartal
Monat:
Apr
Seitenangaben Beitrag:
482 - 488
Reviewed:
ja
Sprache:
en
Volltext / DOI:
doi:10.1109/TNANO.2010.2048433
WWW:
http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=5451089
Format:
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