The dynamic behavior and position stability of servo drives are influenced by many parameters. One major influencing parameter is the pulse width modulation (PWM) frequency. With inverters based on wide bandgap semiconductors, the PWM frequency can be increased. This enables a substantial increase in the current control bandwidth. The paper focuses on the influence of the PWM frequency on the dynamics of control loops and position stability, which are derived from theoretical correlations. The theory is verified using a test bench for high dynamic and position stability. The test bench is equipped with a voice coil motor and power electronic with gallium nitride (GaN) power semiconductors for switching frequencies of 100kHz and over. The achieved position stability, measured with a laser-based comparator at the tool center point, is lower than "+-1nm" with a standard deviation of "0.16nm" at a PWM frequency of "f_PWM=100kHz".     «

The dynamic behavior and position stability of servo drives are influenced by many parameters. One major influencing parameter is the pulse width modulation (PWM) frequency. With inverters based on wide bandgap semiconductors, the PWM frequency can be increased. This enables a substantial increase in the current control bandwidth. The paper focuses on the influence of the PWM frequency on the dynamics of control loops and p...     »