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- Title:
Manipulation of IDT-actuated piezoelectric membrane Actuators by Silicon Clamping
- Author(s):
- Zähringer, S.; Purr, J.; Schwesinger, N.
- Journal title:
- Applied Mechanics and Materials
- Year:
- 2014
- Journal volume:
- 518
- Pages contribution:
- 215-219
- Reviewed:
- ja
- Language:
- en
- Fulltext / DOI:
- doi:10.4028/www.scientific.net/AMM.518.215
- Publisher:
- Trans Tech Publications
- Publisher address:
- Switzerland
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