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- Title:
High compositional homogeneity in In-rich InGaAs nanowire arrays on nanoimprinted SiO2/Si (111)
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Hertenberger, S.; Funk, S.; Vizbaras, K.; Yadav, A., Rudolph, D.; Becker, J.; Bolte, S.; Doeblinger, M.; Bichler, M.; Scarpa, G.; Lugli, P.; Zardo, I.; Finley, J.J.; Amann, M.C.; Abstreiter, G.; Koblmueller, G.
- Abstract:
- We report improved homogeneity control of composition-tuned In1−xGaxAs (x < 0.4) nanowire (NW) arrays grown by catalyst-free molecular beam epitaxy(MBE) on nanoimprinted SiO2/Si (111) substrates. Using very high As/(Ga+In) ratios at growth temperatures of 550 °C enabled uniform incorporation of the respective group-III elements (In,Ga) over the investigated composition range, confirmed by high-resolution x-ray diffraction (HRXRD) and energy dispersive x-ray spectroscopy. Low-temperature (20 K) photoluminescence of these In-rich In1−xGaxAs NW ensembles reveal state-of-the-art linewidths of ∼29–33 meV. These are independent of Ga content, suggesting an overall low degree of phase separation. In contrast, self-assembled, non-periodic In1−xGaxAs NW arrays show larger inhomogeneity with increased peakwidths in 2θ−ω HRXRD scans as well as broadened Raman modes. These results demonstrate the excellent potential of site-selective MBEgrowth of high-periodicity non-tapered In1−xGaxAs NW arrays with low size and composition dispersion for optimized device integration on Si.
- Keywords:
- Self assembly III-V semiconductors Photoluminescence Epitaxy Molecular beam epitaxy
- Journal title:
- Appl. Phys. Lett. 101, 043116 (2012)
- Year:
- 2012
- Year / month:
- 2012-07
- Quarter:
- 3. Quartal
- Month:
- Jul
- Reviewed:
- ja
- Language:
- en
- Fulltext / DOI:
- doi:10.1063/1.4738769
- WWW:
- http://scitation.aip.org/content/aip/journal/apl/101/4/10.1063/1.4738769
- Publisher:
- AIP Publishing LLC.
- Status:
- Erstveröffentlichung
- Format:
- Text
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