User: Guest  Login
Title:

What Happens Turning a 250µm Thin Piezo-stack Sideways?

Document type:
Zeitschriftenaufsatz
Author(s):
Zähringer, S.; Schwesinger, N.
Abstract:
Usually when piezoelectric membrane actuators are mentioned, one classically thinks of a passive membrane with a piezoelectric actuator on top. In this paper omitting the passive membrane will be suggested. Therefore, the piezoelectric actuator will not be commonly designed as plate capacitor structure, such as that the piezoelectric material sitting between two plate electrodes. Rather will the actuation be caused by structured surface electrodes on only one side of the piezoelectric material,...     »
Journal title:
Microsystem Technologies
Year:
2010
Journal volume:
Volume 16
Month:
May
Journal issue:
5
Pages contribution:
871-877
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1007/s00542-010-1053-5
WWW:
http://link.springer.com/article/10.1007/s00542-010-1053-5#
Publisher:
Springer-Verlag
Print-ISSN:
0946-7076
E-ISSN:
1432-1858
Semester:
WS 09-10
Format:
Text
 BibTeX