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Titel:

What Happens Turning a 250µm Thin Piezo-stack Sideways?

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Zähringer, S.; Schwesinger, N.
Abstract:
Usually when piezoelectric membrane actuators are mentioned, one classically thinks of a passive membrane with a piezoelectric actuator on top. In this paper omitting the passive membrane will be suggested. Therefore, the piezoelectric actuator will not be commonly designed as plate capacitor structure, such as that the piezoelectric material sitting between two plate electrodes. Rather will the actuation be caused by structured surface electrodes on only one side of the piezoelectric material,...     »
Zeitschriftentitel:
Microsystem Technologies
Jahr:
2010
Band / Volume:
Volume 16
Monat:
May
Heft / Issue:
5
Seitenangaben Beitrag:
871-877
Reviewed:
ja
Sprache:
en
Volltext / DOI:
doi:10.1007/s00542-010-1053-5
WWW:
http://link.springer.com/article/10.1007/s00542-010-1053-5#
Verlag / Institution:
Springer-Verlag
Print-ISSN:
0946-7076
E-ISSN:
1432-1858
Semester:
WS 09-10
Format:
Text
 BibTeX