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- Title:
Solidly Mounted Resonators with Layer-Transferred AlN using Sacrificial Crystalline Surfaces
- Author(s):
- Abd Allah,Mohamed AND Robert Thalhammer AND Jyrki Kaitila AND Thomas Herzog AND Werner Weber AND Doris Schmitt-Landsiedel
- Pages contribution:
- 375-378
- Book / Congress title:
- IEEE Proceedings of European Solid-State Device Research Conference ESSDERC
- Year:
- 2009
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