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- Title:
Annealing‐Free Ohmic Contacts to n‐Type GaN via Hydrogen Plasma‐Assisted Atomic Layer Deposition of Sub‐Nanometer AlOx
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Christis, Maximilian; Henning, Alex; Bartl, Johannes D.; Zeidler, Andreas; Rieger, Bernhard; Stutzmann, Martin; Sharp, Ian D.
- Journal title:
- Advanced Materials Interfaces
- Year:
- 2023
- Journal volume:
- 11
- Journal issue:
- 4
- Fulltext / DOI:
- doi:10.1002/admi.202300758
- Publisher:
- Wiley
- E-ISSN:
- 2196-73502196-7350
- Date of publication:
- 01.12.2023
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