Growth of aluminum nitride on a silicon nitride substrate for hybrid photonic circuits

Document type:: Zeitschriftenaufsatz
Author(s):: Terrasanta, G; Müller, M; Sommer, T; Geprägs, S; Gross, R; Althammer, M; Poot, M
Title:: Growth of aluminum nitride on a silicon nitride substrate for hybrid photonic circuits
Journal title:: Materials for Quantum Technology
Year:: 2021
Journal volume:: 1
Journal issue:: 2
Pages contribution:: 021002
Fulltext / DOI:: doi:10.1088/2633-4356/ac08ed
Publisher:: IOP Publishing
E-ISSN:: 2633-4356
Date of publication:: 01.06.2021
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