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Document type:
Konferenzbeitrag 
Contribution type:
Vortrag / Präsentation 
Author(s):
Künzig, T.; Iannacci, J.; Schrag, G.; Wachutka, G. 
Title:
Study of an active thermal recovery mechanism for an electrostatically actuated RF-MEMS switch 
Book / Congress title:
Proceedings of the 13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems 
Congress (additional information):
EuroSime 2012, April, 16-18, Cascais, Portugal 
Publisher:
IEEE 
Year:
2012 
Reviewed:
ja 
Language:
en 
Publication format:
CD-ROM / DVD 
versions