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Title:

Study of an active thermal recovery mechanism for an electrostatically actuated RF-MEMS switch

Document type:
Konferenzbeitrag
Contribution type:
Vortrag / Präsentation
Author(s):
Künzig, T.; Iannacci, J.; Schrag, G.; Wachutka, G.
Book / Congress title:
Proceedings of the 13th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems
Congress (additional information):
EuroSime 2012, April, 16-18, Cascais, Portugal
Publisher:
IEEE
Year:
2012
Reviewed:
ja
Language:
en
Publication format:
CD-ROM / DVD
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