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- Title:
Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation
- Document type:
- Konferenzbeitrag
- Contribution type:
- Textbeitrag / Aufsatz
- Author(s):
- Niessner, M.; Schrag, G.; Iannacci, J.; Wachutka, G.
- Pages contribution:
- pp. 598-601
- Book / Congress title:
- Proceedings of the Nanotech - NSTI 2012- Vol. 2
- Congress (additional information):
- June 18-21, Santa Clara, CA, USA
- Publisher address:
- New York
- Year:
- 2012
- Reviewed:
- ja
- Language:
- en
BibTeX
Occurrences:
- mediaTUM GesamtbestandEinrichtungenSchools TUM School of Computation, Information and TechnologyDepartmentsElectrical EngineeringMicrosensors and Actuators (Prof. Schrag)