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Title:

Squeeze-Film Damping in Perforated Microstructures: Modeling, Simulation and Pressure-Dependent Experimental Validation

Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Niessner, M.; Schrag, G.; Iannacci, J.; Wachutka, G.
Pages contribution:
pp. 598-601
Book / Congress title:
Proceedings of the Nanotech - NSTI 2012- Vol. 2
Congress (additional information):
June 18-21, Santa Clara, CA, USA
Publisher address:
New York
Year:
2012
Reviewed:
ja
Language:
en
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