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Title:

Design of a normally closed piezoelectric micro valve

Document type:
Konferenzbeitrag
Contribution type:
Textbeitrag / Aufsatz
Author(s):
Zähringer, S.; Menacher, M.; Kirchner, P.; Schwesinger, N.
Pages contribution:
448-451
Abstract:
Based on a previously developed piezoelectric membrane actuator a normally closed piezoelectric micro valve is designed. The principle of this novel actuator is explained in this paper as well as the possible design of a normally closed piezoelectric micro valve. The actuator operates with surface electrodes. The thus generated electric field causes an inhomogeneous mechanical stress distribution within the piezoelectric material. Because of this the piezoelectric material is forced to deflect w...     »
Book / Congress title:
Nanotechnology 2010: Electronics, Devices, Fabrication, MEMS, Fluidics and Computational - Technical Proceedings of the 2010 NSTI Nanotechnology Conference and Expo
Congress (additional information):
NSTI-Nanotech 2010
Year:
2010
Quarter:
2. Quartal
Month:
Jun
Covered by:
Scopus
E-ISBN:
978-143983402-2
Reviewed:
ja
Language:
en
Semester:
SS 10
Format:
Text
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