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Title:

In situ direct visualization of irradiated electron-beam patterns on unprocessed resists using atomic force microscopy

Document type:
Zeitschriftenaufsatz
Author(s):
Koop, H., Schnurbusch, D., Müller, M., Gründl, T., Zech, M., Amann, M. C., Karrai, K., Holleitner, A.
Journal title:
Journal of Vacuum Science and Technology
Year:
2010
Year / month:
2010-07
Quarter:
3. Quartal
Month:
Jul
Journal issue:
28/4
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1116/1.3457938
WWW:
http://avspublications.org/jvstb/resource/1/jvtbd9/v28/i4/p802_s1
Print-ISSN:
1071-1023
Status:
published (reviewed)
Semester:
SS 02
TUM Institution:
Lehrstuhl für Halbleitertechnologie (E26)
Format:
Text
 BibTeX