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- Title:
"The Effect of Thermoelastic Damping on the Total Q-Factor of State-of-the-Art MEMS Gyroscopes with Complex Beam-Like Suspensions"
- Document type:
- Konferenzbeitrag
- Author(s):
- Künzig, T.; Niessner, M. ; Wachutka, G.; Schrag, G.; Hammer, H.
- Book / Congress title:
- Proceedings of EUROSENSORS XXIV
- Congress (additional information):
- September 5-8, 2010, Linz, Austria
- Year:
- 2010
- Language:
- en
- Publication format:
- CD-ROM / DVD
- Format:
- Text
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