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Title:

"The Effect of Thermoelastic Damping on the Total Q-Factor of State-of-the-Art MEMS Gyroscopes with Complex Beam-Like Suspensions"

Document type:
Konferenzbeitrag
Author(s):
Künzig, T.; Niessner, M. ; Wachutka, G.; Schrag, G.; Hammer, H.
Book / Congress title:
Proceedings of EUROSENSORS XXIV
Congress (additional information):
September 5-8, 2010, Linz, Austria
Year:
2010
Language:
en
Publication format:
CD-ROM / DVD
Format:
Text
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