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Title:

"Experimental Analysis and Modeling of the Mechanical Impact during the Dynamic Pull-In of RF-MEMS Switches"

Document type:
Konferenzbeitrag
Author(s):
Niessner, M. ; Iannacci, J. ; Schrag, G. ; Wachutka, G.
Pages contribution:
pp. 267-270
Book / Congress title:
International Conference on Advanced Semiconductor Devices and Microsystems - ASDAM
Congress (additional information):
Oct. 25-27, 2010, Smolenice Castle, Slovakia
Year:
2010
Reviewed:
ja
Language:
en
Publication format:
Print
Format:
Text
 BibTeX