"The  Effect of Thermoelastic Damping on the Total Q-Factor of State-of-the-Art MEMS Gyroscopes with Complex Beam-Like Suspensions"

Titel:: "The Effect of Thermoelastic Damping on the Total Q-Factor of State-of-the-Art MEMS Gyroscopes with Complex Beam-Like Suspensions"
Dokumenttyp:: Konferenzbeitrag
Autor(en):: Künzig, T.; Niessner, M. ; Wachutka, G.; Schrag, G.; Hammer, H.
Kongress- / Buchtitel:: Proceedings of EUROSENSORS XXIV
Kongress / Zusatzinformationen:: September 5-8, 2010, Linz, Austria
Jahr:: 2010
Sprache:: en
Erscheinungsform:: CD-ROM / DVD
Format:: Text
BibTeX

Vorkommen: