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Title:

Quality and parameter control of X-ray absorption gratings by angular X-ray transmission

Document type:
Zeitschriftenaufsatz
Author(s):
Gustschin, Nikolai; Gustschin, Alex; Meyer, Pascal; Viermetz, Manuel; Riederer, Philipp; Herzen, Julia; Mohr, Jürgen; Pfeiffer, Franz
Abstract:
Here we report on a non-destructive, spatially resolving and easy to implement quality and parameter control method for high aspect ratio X-ray absorption gratings. Based on angular X-ray transmission measurements, our proposed technique allows to determine the duty cycle, the transmittance, the height, as well as the local inclination of the absorbing grating structures. A key advantage of the presented method is a fast and extensive grating quality evaluation without the need of implementing a...     »
Journal title:
Optics Express
Year:
2019
Journal volume:
27
Journal issue:
11
Pages contribution:
15943
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.1364/oe.27.015943
WWW:
https://www.osapublishing.org/oe/abstract.cfm?uri=oe-27-11-15943
Publisher:
The Optical Society
E-ISSN:
1094-4087
Submitted:
13.12.2018
Accepted:
17.02.2019
Date of publication:
21.05.2019
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