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Title:

One-step transfer printing of patterned nanogap electrodes

Document type:
Zeitschriftenaufsatz
Author(s):
Saller, K.; Riedl, H.; Lugli, P.; Koblmüller, G.; Tornow, M.
Abstract:
Direct printing of nanogap-separated metallic contact pairs is described that enables novel nanoelectronic device architectures. Nanotransfer printing (nTP) stamps are grown by molecular beam epitaxy involving layered III-V semiconductors that are selectively etched. Finished stamps comprise both the nanoscale surface trench that becomes the nanogap on printing and a microscale, predetermined geometry that affords the simultaneous integration of contact pads for external electrical testing. This...     »
Journal title:
Journal of Vacuum Science & Technology B 37, 040602 (2019) 2019-06
Year:
2019
Year / month:
2019-06
Quarter:
2. Quartal
Month:
Jun
Pages contribution:
1-6
Language:
en
Fulltext / DOI:
doi:10.1116/1.5100560
WWW:
https://avs.scitation.org/doi/abs/10.1116/1.5100560
Publisher:
American Vacuum Society
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