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Title:

Fabrication of nanopores in multi-layered silicon-based membranes using focused

Document type:
Zeitschriftenaufsatz
Author(s):
Liebes-Peer, Y.; Bandalo, V.; Sökmen, Ü.; Tornow, M.; Ashkenasy, N.
Abstract:
The emergent technology of using nanopores for stochastic sensing of biomolecules introduces a demand for the development of simple fabrication methodologies of nanopores in solid state membranes. This process becomes particularly challenging when membranes of composite layer architecture are involved. To overcome this challenge we have employed a focused electron beam induced chemical etching process. We present here the fabrication of nanopores in silicon-on-insulator based membranes in a sing...     »
Keywords:
Nanopore Silicon-on-insulator Multilayer membrane Nanofabrication Chemical etching Focused electron beam
Journal title:
Microchim Acta 183, 987–994 2015-07
Year:
2015
Year / month:
2015-07
Quarter:
3. Quartal
Month:
Jul
Language:
en
Fulltext / DOI:
doi:10.1007/s00604-015-1557-x
WWW:
https://link.springer.com/article/10.1007/s00604-015-1557-x
Publisher:
Springer Link
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