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Titel:

Fabrication and electrical characterization of a pore-cavity-pore device

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Pedone, D.; Langecker, M.; Münzer, A.; Wei, R.; Nagel, R.; Rant, U.
Abstract:
Part of Special issue on New developments in nanopore research—from fundamentals to applications We present a solid state nanopore device structure comprising two nanopores which are stacked above each other and connected via a pyramidal cavity of 10 fl volume. The process of fabrication of the pore–cavity–pore device (PCP) relies on the formation of one pore in a Si3N4 membrane by electron beam lithography, while the other pore is chemically etched into the Si carrier by a feedback contr...     »
Zeitschriftentitel:
J. Phys.: Condens. Matter 22 454115 Special issue on New developments in nanopore research—from fundamentals to applications
Jahr:
2010
Jahr / Monat:
2010-11
Quartal:
4. Quartal
Monat:
Nov
Sprache:
en
Volltext / DOI:
doi:10.1088/0953-8984/22/45/454115
WWW:
http://iopscience.iop.org/0953-8984/22/45/454115/
Verlag / Institution:
IOP Publishing
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