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- Title:
Thin PZT Materials for Large Deformation Interdigitated Actuators: Simulation & Experimental Validation
- Document type:
- Report / Forschungsbericht
- Author(s):
- Zaki, M.; Zähringer, S.; Schwesinger, N.
- Contracting organization:
- Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP) 2014
- Year:
- 2014
- Format:
- Text
BibTeX