A computational design method for MEMS using COMSOL

Bolognini, F.; Seshia, A.A.; Shea, K.

Title:: A computational design method for MEMS using COMSOL
Author(s):: Bolognini, F.; Seshia, A.A.; Shea, K.
Keywords:: computational synthesis; multicriteria search; integrated automated simulation; MEMS; microsystems
Book / Congress title:: European COMSOL Conference 2007
Congress (additional information):: 23.-24.10.2007
Congress city:: Grenoble, France
Year:: 2007
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