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Title:

Piezoelectric Bulk Material for the Fabrication of Membrane Actuators Using Surface Electrodes for Actuation

Document type:
Zeitschriftenaufsatz
Author(s):
Zähringer, S.; Spornraft, M.; Schwesinger, N.
Abstract:
Using piezoelectric bulk material for manufacturing membrane actuators offers several advantages. Instead of manufacturing e.g. a silicon membrane and then either depositing a piezoelectric thinfilm actuator or mounting a piezo disc or stack to the silicon membrane, it is possible to use the piezoelectric material itself as membrane. Circular lead zirconate titanate(PZT) discs were adapted to silicon surface micromachining technologies. By depositing interdigitated electrode layouts several...     »
Keywords:
Piezoelectric bulk material, Piezoelectric membrane actuator, Surface electrodes, IDT, PZT
Journal title:
Applied Mechanics and Materials
Year:
2013
Month:
Sep
Journal issue:
Vol 404
Pages contribution:
682-687
Covered by:
Scopus
Reviewed:
ja
Language:
en
Fulltext / DOI:
doi:10.4028/www.scientific.net/AMM.404.682
Publisher:
Trans Tech Publications
Publisher address:
Switzerland
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