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Titel:

Piezoelectric Bulk Material for the Fabrication of Membrane Actuators Using Surface Electrodes for Actuation

Dokumenttyp:
Zeitschriftenaufsatz
Autor(en):
Zähringer, S.; Spornraft, M.; Schwesinger, N.
Abstract:
Using piezoelectric bulk material for manufacturing membrane actuators offers several advantages. Instead of manufacturing e.g. a silicon membrane and then either depositing a piezoelectric thinfilm actuator or mounting a piezo disc or stack to the silicon membrane, it is possible to use the piezoelectric material itself as membrane. Circular lead zirconate titanate(PZT) discs were adapted to silicon surface micromachining technologies. By depositing interdigitated electrode layouts several...     »
Stichworte:
Piezoelectric bulk material, Piezoelectric membrane actuator, Surface electrodes, IDT, PZT
Zeitschriftentitel:
Applied Mechanics and Materials
Jahr:
2013
Monat:
Sep
Heft / Issue:
Vol 404
Seitenangaben Beitrag:
682-687
Nachgewiesen in:
Scopus
Reviewed:
ja
Sprache:
en
Volltext / DOI:
doi:10.4028/www.scientific.net/AMM.404.682
Verlag / Institution:
Trans Tech Publications
Verlagsort:
Switzerland
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