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Titel:

Normally closed piezoelectric micro valve

Dokumenttyp:
Konferenzbeitrag
Art des Konferenzbeitrags:
Textbeitrag / Aufsatz
Autor(en):
Zähringer, S.; Menacher, M.; Kirchner, P.; Schwesinger, N.
Seitenangaben Beitrag:
105-109
Abstract:
Based on a previously developed piezoelectric membrane actuator a normally closed piezoelectric micro valve was designed. The presented paper briefly explains the principle of this novel actuator and continues with the possible design of a normally closed piezoelectric micro valve. The actuator operates with surface electrodes. The thus generated electric field causes an inhomogeneous mechanical stress distribution within the piezoelectric material. Because of this the piezoelectric material is...     »
Kongress- / Buchtitel:
Design Test Integration and Packaging of MEMS/MOEMS (DTIP)
Jahr:
2010
Quartal:
2. Quartal
Monat:
May
Nachgewiesen in:
Scopus
Print-ISBN:
978-1-4244-6636-8
E-ISBN:
978-2-35500-011-9
Reviewed:
ja
Sprache:
en
WWW:
http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=5486456&isnumber=5486443
Semester:
SS 10
Format:
Text
 BibTeX