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- Title:
Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Reck, Kristian A.; Bulut, Yusuf; Xu, Zhuijun; Liang, Suzhe; Strunskus, Thomas; Sochor, Benedikt; Gerdes, Holger; Bandorf, Ralf; Müller-Buschbaum, Peter; Roth, Stephan V.; Vahl, Alexander; Faupel, Franz
- Journal title:
- Applied Surface Science
- Year:
- 2024
- Journal volume:
- 666
- Pages contribution:
- 160392
- Fulltext / DOI:
- doi:10.1016/j.apsusc.2024.160392
- Publisher:
- Elsevier BV
- E-ISSN:
- 0169-4332
- Date of publication:
- 01.09.2024
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