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Title:

Early-stage silver growth during sputter deposition on SiO2 and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMS

Document type:
Zeitschriftenaufsatz
Author(s):
Reck, Kristian A.; Bulut, Yusuf; Xu, Zhuijun; Liang, Suzhe; Strunskus, Thomas; Sochor, Benedikt; Gerdes, Holger; Bandorf, Ralf; Müller-Buschbaum, Peter; Roth, Stephan V.; Vahl, Alexander; Faupel, Franz
Journal title:
Applied Surface Science
Year:
2024
Journal volume:
666
Pages contribution:
160392
Fulltext / DOI:
doi:10.1016/j.apsusc.2024.160392
Publisher:
Elsevier BV
E-ISSN:
0169-4332
Date of publication:
01.09.2024
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