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Title:

< i> In Situ< /i> ALD-TEM System to Study Atomic Nucleation Phenomena - Enabled by Ultrathin Large Aspect Ratio Free-Standing Shell Structures

Document type:
Zeitschriftenaufsatz
Author(s):
Burgmann, Stephanie; Afif, Abdulla; Lid, Markus Joakim; Baglo, Kjetil; Chaikasetsin, Settasit; van Helvoort, Antonius T.J.; Prinz, Fritz B.; Haugen, Bjørn; Torgersen, Jan
Journal title:
Key Engineering Materials
Year:
2023
Journal volume:
968
Pages contribution:
31-38
Covered by:
Scopus
Fulltext / DOI:
doi:10.4028/p-0dlr8p
Publisher:
Trans Tech Publications, Ltd.
E-ISSN:
1662-9795
Date of publication:
06.12.2023
TUM Institution:
Lehrstuhl für Werkstoffwissenschaften
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