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- Title:
Thermoelastic damping in MEMS gyroscopes at high frequencies
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Schiwietz, Daniel; Weig, Eva M.; Degenfeld-Schonburg, Peter
- Journal title:
- Microsystems & Nanoengineering
- Year:
- 2023
- Journal volume:
- 9
- Journal issue:
- 1
- Pages contribution:
- 11
- Fulltext / DOI:
- doi:10.1038/s41378-022-00480-1
- Publisher:
- Springer Science and Business Media LLC
- E-ISSN:
- 2055-7434
- Date of publication:
- 16.01.2023
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