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- Title:
A new highly automated sputter equipment for in-situ investigation of deposition processes with synchrotron radiation
- Document type:
- Zeitschriftenaufsatz
- Author(s):
- Döhrmann, R. ; Botta, S. ; Buffet, A. ; Santoro, G. ; Schlage, K. ; Schwartzkopf, M. ; Bommel, S. ; Risch, J.F.H. ; Mannweiler, R. ; Brunner, S. ; Metwalli, E. ; Müller-Buschbaum, P. ; Roth, S.V.
- Journal title:
- Rev. Sci. Instrum.
- Year:
- 2013
- Journal volume:
- 84
- Journal issue:
- 043901
- WWW:
- https://aip.scitation.org/doi/10.1063/1.4798544
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